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Metallic coatings of MEMS at low temperatures: stress, elasticity and non-linear dissipation

机译：低温下mEms的金属涂层：应力，弹性和   非线性耗散

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摘要

We present mechanical measurements performed at low temperatures oncantilever-based microelectro-mechanicalstructures(MEMS) coated with a metalliclayer. Two very different coatings are presented in order to illustrate thecapabilities of the present approach, namely (soft) aluminum and (hard) niobiumoxide. The temperature is used as a control parameter to access materialsproperties. We benefit from low temperature techniques to extract aphase-resolved measurement of the first mechanical resonance mode in cryogenicvacuum. By repeating the experiment on the same samples, after multiplemetallic depositions, we can determine accurately the contribution of thecoating layers to the mechanical properties in terms of surface stress,additional mass, additional elasticity and damping. Analytic theoreticalexpressions are derived and used to fit the data. Taking advantage of theextremely broad dynamic range provided by the technique, we can measure theanelasticity of the thin metallic film. The key parameters describing themetals' dynamics are analyzed in an original way in order to provide newexperimental grounds for future theoretical modelings of the underlyingmechanisms.
机译：我们目前在低温下对涂覆有金属层的悬臂梁式微机电结构（MEMS）进行机械测量。为了说明本方法的能力，提出了两种非常不同的涂层，即（软）铝和（硬）氧化铌。温度用作访问材料属性的控制参数。我们受益于低温技术，提取了低温真空中第一机械共振模式的无相分辨测量结果。通过在相同的样品上重复实验，在多次金属沉积之后，我们可以准确确定涂层在表面应力，附加质量，附加弹性和阻尼方面对机械性能的贡献。解析理论表达式被导出并用于拟合数据。利用该技术提供的极宽的动态范围，我们可以测量金属薄膜的弹性。描述金属动力学的关键参数以原始方式进行了分析，以便为潜在机理的未来理论建模提供新的实验基础。

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